Browsing by Author "McCallum, Martin"
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Publication Impact of illumination source symmetrization in OPC
;Sturtevant, John L. ;Hong, Le ;Jayaram, Srividya ;Renwick, Stephen P.McCallum, MartinProceedings paper2008, Photomask and Next-Generation Lithography Mask Technology XV, 16/04/2008, p.70283M