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Browsing by Author "McCoo, E."

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    Introducing 193 nm lithography

    Pollers, Ingrid
    ;
    Jaenen, Patrick  
    ;
    Van Roey, Frieda  
    ;
    Goethals, Mieke
    ;
    Ronse, Kurt  
    ;
    Davies, G.
    Proceedings paper
    1998, Proceedings of the Microlithography Symposium. Interface '98, 15/11/1998, p.179-198

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