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Browsing by Author "Mebarki, B."

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    Barrier reliability of ALD TaN on sub-100 nm copper low-k interconnects

    Tokei, Zsolt  
    ;
    Gailledrat, Thomas
    ;
    Li, Yunlong  
    ;
    Schuhmacher, Jorg
    ;
    Mandrekar, T.
    ;
    Guggilla, S.
    Proceedings paper
    2005, Adanced Metallization Conference 2004, 19/10/2004, p.801-805

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