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Browsing by Author "Mendes, Monica"

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    Pathways to high-performance extreme ultra-violet lithography resists: Dissociative electron attachment to pentafluoro-phenyl triflate

    Mendes, Monica
    ;
    Tafrishi, Reza
    ;
    Guerra, Pedro
    ;
    Holzmeier, Fabian  
    ;
    Ingolfsson, Oddur  
    Journal article
    2025, ISCIENCE, (28) 12, p.28

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