Browsing by Author "Meszaros, Albert"
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Publication Non-contact metrology for inversion charge carrier mobility by corona charge and photovoltage measurements on blank wafers with a gate dielectric
Oral presentation2010, 16th Workshop on Dielectrics in Microelectronics- WoDIMPublication Noncontact metrology for inversion charge carrier mobility by corona charge and photovoltage measurements on blank wafers with a gate dielectric
Journal article2011, Journal of Vacuum Science and Technology B, (29) 1, p.01AB05Publication Novel noncontact approach to characterization of mobility in inversion layers using corona charging of dielectric and SPV monitoring of sheet resistance
Proceedings paper2010, Advanced Gate Stack, Source/Drain, and Channel Engineering for Si-based CMOS 6: New Materials, Processes, and Equipment, 25/04/2010, p.33-41