Browsing by Author "Metzger, L."

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Stable thin film encapsulation of acceleration sensors using polycrystalline silicon as sacrificial and encapsulation layer

Hoechst, A.
;
Scheuerer, R.
;
Stahl, H.
;
Fischer, F.
;
Metzger, L.
;
Reichenbach, R.
;
Laermer, F.
Journal article
2004, Sensors and Actuators A, (114) 2_3, p.355-361
Thin film encapsulation of acceleration sensors using polysilicon sacrificial layers

Stahl, H.
;
Hoechst, A.
;
Fischer, F.
;
Metzger, L.
;
Reichenbach, R.
;
Laermer, F.
;
Kronmueller, S.
Proceedings paper
2003, Proceedings of Transducers. The 12th International Conference on Solid-State Sensors, Actuators and Microsystems, 8/06/2003, p.1899-1902