Browsing by Author "Meyssen, Veerle"

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Shallow junctions for sub-100 nm CMOS technology

Meyssen, Veerle
;
Stolk, Peter
;
van Zijl, Jeroen
;
van Berkum, Jurgen
;
van de Wijgert, Willem
Proceedings paper
2001, Si Front-End Processing - Physics and Technology of Dopant-Defect Interactions III, 17/04/2001, p.J.3.5.1-J3.5.6
Ultrashallow junctions for advanced CMOS technology

Stolk, Peter
;
Meyssen, Veerle
;
Lindsay, Richard
;
Dachs, Charles
;
Mannino, Giovanni
;
Cowern, Nick
Proceedings paper
2001, Proceedings SEMI Front End Technology Conference, 24/04/2001