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Browsing by Author "Michallet, A."

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    Intra-die temperature non uniformity related to front side emissivity depandence during rapid thermal annealing

    Laviron, C.
    ;
    Lindsay, Richard
    ;
    Michallet, A.
    ;
    Halimaoui, A.
    ;
    Granneman, E.
    Proceedings paper
    2003, Advanced Short-Time Thermal Processing for Si-Based CMOS Devices, 28/04/2003, p.3-10

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