Browsing by Author "Michallet, A."
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Publication Intra-die temperature non uniformity related to front side emissivity depandence during rapid thermal annealing
;Laviron, C. ;Lindsay, Richard ;Michallet, A. ;Halimaoui, A.Granneman, E.Proceedings paper2003, Advanced Short-Time Thermal Processing for Si-Based CMOS Devices, 28/04/2003, p.3-10