Browsing by Author "Milita, S."
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Publication Non-destructive techniques for identification and control of processing induced extended defects in silicon and correlation with device yield
;Vanhellemont, Jan ;Milita, S. ;Servidori, M. ;Higgs, V. ;Kissinger, G.Gramenova, EmiliaJournal article1997, Journal de Physique III, 7, p.1425-1433