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Browsing by Author "Miller, Elias"

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    Low Landing Energy as an Enabler for Optimal Contour Based OPC Modeling in the EUV Era

    Alkoken, Ran
    ;
    Baram, Mor
    ;
    Oron, Gadi
    ;
    Schuch, Nivea
    ;
    Robert, Frederic
    ;
    Figueiro, Thiago
    Proceedings paper
    2024, Conference on Metrology, Inspection, and Process Control XXXVIII, FEB 26-29, 2024, p.Art. 1295516

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