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Browsing by Author "Min, K. J."

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    Effects of plasma chemistry on low-k film properties

    Kim, Dongchan
    ;
    Urbanowicz, Adam
    ;
    Mannaert, Geert  
    ;
    Struyf, Herbert  
    ;
    Min, K. J.
    ;
    Kang, C. J.
    Proceedings paper
    2007, 29th International Symposium on Dry Process - DPS, 13/11/2007

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