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Browsing by Author "Minato, Yasuharu"

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    Publication

    Impact of hydrogen peroxide in ultrapure water

    Ogawa, Yuichi
    ;
    Masaoka, Toru
    ;
    Gan, Nobuko
    ;
    Fujimura, Yu
    ;
    Minato, Yasuharu
    ;
    Miyazaki, Yoichi
    Proceedings paper
    2017, Surface Preparation and Cleaning Conference - SPCC, 27/03/2017, p.91-101

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