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Browsing by Author "Minvielle, A."

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    CD control comparison of step & repeat versus step & scan DUV lithography for sub-0.25 μm gate printing

    Ronse, Kurt  
    ;
    Maenhoudt, Mireille
    ;
    Marschner, Thomas
    ;
    Van den hove, Luc  
    ;
    Streefkerk, B.
    Proceedings paper
    1998, Optical Microlithography XI, 25/02/1998, p.56-66

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