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Browsing by Author "Miya, Katsuhiko"

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    Publication

    Application of single-wafer wet cleaning prior to epitaxial SiGe process

    Sano, Ken-Ichi
    ;
    Wada, Masayuki
    ;
    Leys, Frederik
    ;
    Loo, Roger  
    ;
    Hikavyy, Andriy  
    ;
    Mertens, Paul  
    Journal article
    2009, Solid State Phenomena, 145-146, p.173-176

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