Browsing by Author "Miyazaki, Shinji"
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Publication Improvement of EUV Contact Hole Pattern Rectification using Novel Directed Self-Assembly Materials
;Kim, Dong-Ook ;Kim, Jihoon ;Kang, Namgoo ;Her, Youngjun ;Miyazaki, ShinjiAlperson, BoazProceedings paper2025, 2025 Conference on Novel Patterning Technologies, FEB 24-27, 2025