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Browsing by Author "Mochalov, A"

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    Effect of quartz window temperature on plasma composition during STI etch

    Danilkin, Evgeny
    ;
    Shamiryan, Denis
    ;
    Baklanov, Mikhaïl
    ;
    Milenin, Alexey  
    ;
    Boullart, Werner  
    Proceedings paper
    2008, Micro- and Nanoelectronics 2007, 1/10/2007, p.7.03E+03

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