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Browsing by Author "Moeller, W."

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    Depth profiling of ZrO2/SiO2/Si stacks-TOF-SIMS and computer simulation study

    Ignatova, V.A.
    ;
    Conard, Thierry  
    ;
    Moeller, W.
    ;
    Vandervorst, Wilfried  
    ;
    Gijbels, R.
    Meeting abstract
    2003, International Conference on Secondary Ion Mass Spectrometry - SIMS XIV, 14/09/2003, p.94

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