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Browsing by Author "Moffet, J."

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    Residual stresses in tungsten lines: analysis of experimental (micro-Raman spectroscopy, XRD) and numerical results

    De Wolf, Ingrid  
    ;
    Maes, Herman
    ;
    Moffet, J.
    ;
    Ignat, M.
    Proceedings paper
    1995, Materials Reliability in Microelectronics V, 17/04/1995, p.109-114

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