Browsing by Author "Mogilnikov, K."
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Publication Adsorption isobars of fluorocarbon compounds selected for cryogenic etching of low-k materials
Meeting abstract2015, Spring MRS Meeting Symposium BB: Innovative Interconnects/Electrodes for Advances Devices, Flexible and Green Energy Electronics, 6/04/2015, p.BB2.03Publication Investigation of plasma damage of low-k dielectrics during cryogenic etching