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Browsing by Author "Mokhtarzadeh, Charles"

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    Actinic photoemission spectroscopy of litho materials using a table-top ultrafast EUV source

    Singh, Dhirendra  
    ;
    Dorney, Kevin  
    ;
    Holzmeier, Fabian  
    ;
    Witting Larsen, Esben  
    ;
    Galleni, Laura  
    Proceedings paper
    2024, Conference on Metrology, Inspection, and Process Control XXXVIII, FEB 26-29, 2024, p.1295504

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