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Browsing by Author "Molchanov, Alexander"

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    Materials characterization and device analysis for evaluation of semiconductor processes by highly-sophisticated photoelastic stress measurement technique

    Herms, Martin
    ;
    Wagner, Matthias
    ;
    Molchanov, Alexander
    ;
    Lin, Pinyen
    ;
    De Wolf, Ingrid  
    ;
    Zhao, Ming  
    Journal article
    2015, Physica Status Solidi C, (12) 8, p.1085-1089

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