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Browsing by Author "Monnoyer, Philippe"

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    Arf solutions for low-k1 back-end imaging

    Wiaux, Vincent  
    ;
    Montgomery, Patrick
    ;
    Vandenberghe, Geert  
    ;
    Monnoyer, Philippe
    ;
    Ronse, Kurt  
    Proceedings paper
    2003, Optical Microlithography XVI, 23/02/2003, p.270-281
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    Optical extensions towards the 45-nm node

    Hendrickx, Eric  
    ;
    Monnoyer, Philippe
    ;
    Van Look, Lieve  
    ;
    Vandenberghe, Geert  
    Proceedings paper
    2004, Optical Microlithography XVII, 22/02/2004, p.357-368

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