Browsing by Author "Monnoyer, Philippe"
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Publication Arf solutions for low-k1 back-end imaging
Proceedings paper2003, Optical Microlithography XVI, 23/02/2003, p.270-281Publication Optical extensions towards the 45-nm node
Proceedings paper2004, Optical Microlithography XVII, 22/02/2004, p.357-368