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Browsing by Author "Mori, Masato"

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    Thermal recovery process of electron irradiated Si1-xCx source/drain n-MOSFETs

    Takakura, Kenichiro  
    ;
    Mori, Masato
    ;
    Yoneoka, Masashi
    ;
    Tsunoda, Isao
    ;
    Nakashima, Toshiyuki
    Journal article
    2015, Physica Status Solidi C, (12) 12, p.1405-1408

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