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Browsing by Author "Moritz, H."

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    Robust and environmentally stable deep UV positive resist: optimization of SUCCESS ST2

    Schwalm, R.
    ;
    Binder, H.
    ;
    Fischer, T.
    ;
    Funhoff, D.
    ;
    Goethals, Mieke
    ;
    Grassmann, A.
    ;
    Moritz, H.
    Proceedings paper
    1994, Advances in Resist Technology and Processing XI, 27/02/1994, p.2-13

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