Repository logo Institutional repository
  • Communities & Collections
  • Scientific publicationsOpen knowledge
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Morrish, Rachel"

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results per page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Kinetic to transport-limited anhydrous HF etching of silicon oxynitride films in supercritical CO2

    Morrish, Rachel
    ;
    Witvrouw, Ann
    ;
    Muscat, Anthony
    Journal article
    2007, Journal of Physical Chemistry C, (111) 42, p.15251-15257

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings