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Browsing by Author "Mouche, M.J."

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    The importance of H-passivation for low-temperature APCVD silicon epitaxy

    Mouche, M.J.
    ;
    Caymax, Matty  
    ;
    Bender, Hugo  
    ;
    Storm, Wolfgang
    ;
    Vandervorst, Wilfried  
    Proceedings paper
    1996, Proceedings of the 3rd International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSS, 23/09/1996, p.269-272

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