Browsing by Author "Mount, A."
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Publication Fabrication of test structures to monitor stress in SU-8 films used for MEMS applications
;Smith, S. ;Brockie, N. L. ;Murray, J.; ;Horsfall, A. B. ;Terry, J. G.Stevenson, J. T. M.Proceedings paper2010, IEEE International Conference on Microelectronic Test Structures - ICMTS, 22/03/2010, p.8-13