Browsing by Author "Mouraille, O."
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Publication 22nm node imaging and beyond: a comparison of EUV and ArFi double patterning
Proceedings paper2010, International Symposium on Lithography Extensions, 20/10/2010Publication Freeform illumination sources: an experimental study of source-mask optimization for 22nm SRAM cells
Proceedings paper2010, Optical Microlithography XXIII, 21/02/2010, p.764008