Browsing by Author "Mouwen, Nils"
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Publication Wet-chemical etching of metals for advanced semiconductor technology nodes: Ru etching in acidic Ce4+ solutions
Journal article2019, Electrochimica Acta, 306, p.285-298Publication Wet-chemical etching of ruthenium for advanced interconnects
Meeting abstract2019, MRS 2019 Spring Conference, 22/04/2019Publication Wet-chemical etching of ruthenium in acidic Ce4+ solution
Proceedings paper2018, Ultra Clean Processing of Semiconductor Surafces XIV - UCPSS, 2/09/2018, p.284-287