Repository logo Institutional repository
  • Communities & Collections
  • Scientific publicationsOpen knowledge
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Moyaerts, Gert"

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results per page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Quantitative modeling of H2O2 decomposition in SC1

    Mertens, Paul  
    ;
    Baeyens, Martien
    ;
    Moyaerts, Gert
    ;
    Okorn-Schmidt, H. F.
    ;
    Vos, Rita  
    ;
    De Waele, Rita
    Proceedings paper
    1998, Proceedings of the 5th International Symposium on Cleaning Technology in Semiconductor Device Manufacturing, 31/08/1997, p.176-183

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings