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Browsing by Author "Mukherjee, Shriparna"

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    Novel metrology for mask degradation: IR-AFM, XPS depth profiling and HAXPES

    de Rooij-Lohmann, Veronique
    ;
    Mukherjee, Shriparna
    ;
    Wu, Chien-Ching
    ;
    Ebeling, Rob
    ;
    Pandey, Komal
    Proceedings paper
    2024, 2024 Conference on Photomask Technology, 2024-09-29, p.132160Y

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