Browsing by Author "Mukherjee, Shriparna"
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Publication Novel metrology for mask degradation: IR-AFM, XPS depth profiling and HAXPES
;de Rooij-Lohmann, Veronique ;Mukherjee, Shriparna ;Wu, Chien-Ching ;Ebeling, RobPandey, KomalProceedings paper2024, 2024 Conference on Photomask Technology, 2024-09-29, p.132160Y