Browsing by Author "Mulder, M."
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Publication Freeform illumination sources: an experimental study of source-mask optimization for 22nm SRAM cells
Proceedings paper2010, Optical Microlithography XXIII, 21/02/2010, p.764008Publication Freeform illumination sources: Source mask optimization for 22 nm node SRAM
Proceedings paper2009, 6th International Symposium on Immersion Lithography Extensions, 22/10/2009Publication The aging of all-solid-state thin-film lithium-ion batteries using in-situ neutron depth profiling
Oral presentation2012, ESS Science Symposium: Neutrons for Energy