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Browsing by Author "Mulders, A. M."

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    Sub-0.25 micron lithography applying illumination pupil filtering (quadrupole) on a DUV step-and-repeat system

    Finders, Jo
    ;
    Mulders, A. M.
    ;
    Krist, J.
    ;
    Flagello, D.
    ;
    Luehrmann, P.
    ;
    Maenhoudt, Mireille
    Proceedings paper
    1998, OLIN Microlithography Symposium. Interface '98, 15/11/1998, p.81-92

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