Browsing by Author "Mulders, A. M."
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Publication Sub-0.25 micron lithography applying illumination pupil filtering (quadrupole) on a DUV step-and-repeat system
;Finders, Jo ;Mulders, A. M. ;Krist, J. ;Flagello, D. ;Luehrmann, P.Maenhoudt, MireilleProceedings paper1998, OLIN Microlithography Symposium. Interface '98, 15/11/1998, p.81-92