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Browsing by Author "Murell, A. J."

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    Electrical characterization of ultra shallow dopant profiles

    Clarysse, Trudo
    ;
    Vandervorst, Wilfried  
    ;
    Collart, E. J. H.
    ;
    Murell, A. J.
    Proceedings paper
    1999, Analytical and Diagnostic Techniques for Semiconductor Materials, Devices, and Processes, 16/09/1999, p.76-88

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