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Browsing by Author "Muroyama, M."

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    Process integration induced thermodesorption from SiO2/SiLK resin dielectric based interconnects

    Baklanov, Mikhaïl
    ;
    Muroyama, M.
    ;
    Judelewicz, Moshe
    ;
    Kondoh, Eiichi
    ;
    Li, H.
    ;
    Waeterloos, Joost
    Journal article
    1999, J. Vacuum Science and Technology B, (17) 5, p.2136-2146

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