Browsing by Author "Muroyama, M."
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Publication Process integration induced thermodesorption from SiO2/SiLK resin dielectric based interconnects
;Baklanov, Mikhaïl ;Muroyama, M. ;Judelewicz, Moshe ;Kondoh, Eiichi ;Li, H.Waeterloos, JoostJournal article1999, J. Vacuum Science and Technology B, (17) 5, p.2136-2146