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Browsing by Author "Muzio, E."

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    Limits of optical lithography

    Maenhoudt, Mireille
    ;
    Verhaegen, Staf
    ;
    Ronse, Kurt  
    ;
    Zandbergen, Peter
    ;
    Muzio, E.
    Proceedings paper
    2000, Optical Microlithography XIII, 1/03/2000, p.373-387

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