Browsing by Author "Nényei, Z."
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Publication In situ gas analysis on an RTP tool with APIMS
Proceedings paper1998, 44th Annual Meeting of Inst. Environmental Science and Technology, 26/04/1998, p.519-526Publication In-line ambient impurity measurement of a rapid thermal process chamber by using atmospheric pressure ionization mass spectrometer
Proceedings paper1998, Rapid Thermal and Integrated Processing VII, 13/04/1998, p.51-56