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Browsing by Author "Nagar, Margalit"

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    Wafer scale copper direct plating on thin PVD RuTa layers: A route to enable filling 30 nm features and below?

    Armini, Silvia  
    ;
    El-Mekki, Zaid  
    ;
    Nagar, Margalit
    ;
    Radisic, Alex  
    ;
    Vereecken, Philippe  
    Journal article
    2014, Journal of the Electrochemical Society, (161) 10, p.D564-D570

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