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Browsing by Author "Naghdi, Samira"

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    Precise optical characterization of SiGe thin films for next generation transistor metrology

    Naghdi, Samira
    ;
    Ciesielski, Richard
    ;
    Loo, Roger  
    ;
    Bogdanowicz, Janusz  
    ;
    Soltwisch, Victor
    Proceedings paper
    2025, 40th European Mask and Lithography Conference (EMLC), 2025-06-16, p.137870T

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