Browsing by Author "Nam, Jaewoo"

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Manufacturability of dense hole arrays with directed self-assembly using the CHIPS flow

Singh, Arjun
;
Nam, Jaewoo
;
Lee, Jongsu
;
Chan, BT
;
Wu, Hengpeng
;
Yin, Jian
;
Cao, Yi
;
Gronheid, Roel
Proceedings paper
2016, Alternative Lithographic Technologies VIII, 21/02/2016, p.97770P
Understanding defects in CHIPS flow hexagonal arrays and strategies for improvement

Singh, Arjun
;
Lee, Jongsu
;
Nam, Jaewoo
;
Chan, BT
;
Gronheid, Roel
Proceedings paper
2016, DSA Symposium, 11/10/2016