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Browsing by Author "Narasimhan, M."

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    CVD Mn-based self-formed barrier for advanced interconnect technology

    Siew, Yong Kong  
    ;
    Jourdan, Nicolas  
    ;
    Barbarin, Yohan
    ;
    Machillot, Jerome  
    ;
    Demuynck, Steven  
    Proceedings paper
    2013, IEEE International Interconnect Technology Conference - IITC, 13/06/2013, p.2.3

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