Browsing by Author "Naumov, Sergei"
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Publication Effect of pressure on efficiency of UV curing of CVD low-k material at different wavelengths
;Prager, Lutz ;Naumov, Sergei ;Pistol, L. ;Wennrich, L. ;Buchmeister, M. R.Marsik, PremyslMeeting abstract2008, 17th Workshop Materials for Advanced Metallization, 2/03/2008