Repository logo Institutional repository
  • Communities & Collections
  • Browse
  • Site
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Nealey, Paul S."

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results Per Page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Studying the effects of chemistry and geometry on DSA hole-shrink process in three dimensions

    Zhou, Chun
    ;
    Kurosawa, Tsuyoshi
    ;
    Dazai, Takahiro
    ;
    Doise, Jan  
    ;
    Ren, Jiaxing
    ;
    Bezik, Cody
    Proceedings paper
    2018, Novel Patterning Technologies 2018, 25/02/2018, p.105840K

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings