Browsing by Author "Nealy, Paul F."
Now showing 1 - 2 of 2
- Results Per Page
- Sort Options
Publication All track directed self-assembly of block copolymers: process flow and origin of defects
Proceedings paper2012, Alternative Lithographic Technologies IV, 12/02/2012, p.83230DPublication Towards an all-track 300 mm process for direct self-assembly
Journal article2011, Journal of Vacuum Science and Technology B, (29) 6, p.06F203