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Browsing by Author "Neill, A."

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    Design and application of a sensor to monitor stress in deep submicron copper interconnects

    Wilson, Chris  
    ;
    Croes, Kristof  
    ;
    Tokei, Zsolt  
    ;
    Beyer, Gerald  
    ;
    Horsfall, A.
    ;
    Neill, A.
    Proceedings paper
    2010, Stress-Induced Phenomena in Metallization: 11th International Workshop, 11/04/2010, p.133-138

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