Browsing by Author "Neira, Imanol"
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Publication Assessment of resist outgassing related EUV optics contamination for CAR and non-CAR material chemistries
Proceedings paper2011, Advances in Resist Materials and Processing Technology XXVIII, 27/02/2011, p.797208Publication Correlation of EUV optics contamination and the photoresist chemistry
Proceedings paper2010, International Symposium on Extreme Ultraviolet Lithography, 17/10/2010Publication Unraveling the effect of resist composition on EUV optics contamination
Proceedings paper2011, Extreme Ultraviolet (EUV) Lithography II, 27/02/2011, p.79692L