Browsing by Author "Nerke, Eva"
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Publication Actualizing EUV mask model during a reticle's life through TEM/EDX analysis
Proceedings paper2025, Photomask Technology, 2025-09-22, p.136870APublication Tuning, Modelling, and Verifying Effects of Intermixing on EUV Multilayer Mirror Performance via a Combined Simulation and Experimental Approach
Proceedings paper2025, Photomask Technology, 2025-09-22, p.136870Z