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Browsing by Author "Nge, Philip C. W."

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    High-NA EUV Optical Proximity Correction Modeling Flow: from Data Preparation to Model Validation

    Wei, Chih-, I
    ;
    Chen, Chao-Heng
    ;
    Thakare, Devesh
    ;
    Levinson, Zachary
    ;
    Nge, Philip C. W.
    ;
    Schatz, Jirka
    Proceedings paper
    2025, Photomask Technology, 2025-06-04, p.136870Q

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