Browsing by Author "Nicolai, Herman"
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Publication Dry resist process development toward depth of focus improvement in high NA EUV lithography
;Huang, Ching-Chung ;Haider, Ali ;Chen, Zhengtao ;Gullo, FrancescoBrouri, MohandJournal article2026, JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3, (25) 2, p.021205