Browsing by Author "Nieuborg, Nancy"
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Publication Metrology and inspection requirements for successful stacking of integrated circuits
Journal article2014, IEEE Transactions on Semiconductor Manufacturing, (27) 3, p.370-376Publication Progress on background signal analysis of bare wafer inspection systems based on light scattering for III/V epitaxial growth monitoring
Proceedings paper2014, 25th Annual SEMI Advanced Semiconductor Manufacturing Conference - ASMC, 19/05/2014, p.283-287